Solid State RF generators including 2MHz, 13.56MHz, 27MHz, 64MHz frequency are most commonly used in plasma process. EECTECH can provides output power of 1KW, 3KW, 10KW, 20KW,etc., as per customers’ different requirements.
Solid State RF generators including 2MHz, 13.56MHz, 27MHz, 64MHz frequency are most commonly used in plasma process. EECTECH can provides output power of 1KW, 3KW, 10KW, 20KW,etc., as per customers’ different requirements.
Features:
u Frequency stability ±3%
u Wide load adaptability
u High reliability
Applications:
u Solid state RF generators are designed for all plasma processing applications including PECVD, HDPCVD, PVD, ALD, etc. and for manufacture of integrated circuits, solar cells, flat panel displays(FPD), LED and data storage devices.
Technical parameters:
Model Freq. (MHz) Pout (W) Vin (V) Efficiency (%) Heat Dissipation WSPS-13.56-1000 13.56 1000 220V 65 Air cooling WSPS-13.56-3000 13.56 3000 220V 65 Water cooling WSPS-27-1000 27 1000 220V 65 Air cooling WSPS-27-3000 27 3000 220V 65 Water cooling WSPS-64-1000 64 1000 220V 65 Air cooling WSPS-64-3000 64 3000 220V 65 Water cooling WSPS-162-1000 162.5 1000 220V 65 Air cooling WSPS-162-3000 162.5 3000 220V 65 Water cooling WSPS-325-800 325 800 220V 60 Air cooling WSPS-325-1500 325 1500 220V 60 Water cooling WSPS-325-3000 325 3000 220V 60 Water cooling WSPS-433-100 433 100 28V 65 Air cooling
For more information, please contact EECTECH